Dry Pump Central Monitoring System
(DPM CMS)
Utitech's DPM CMS solution delivers an integrated monitoring solution that unifies thousands and multi-vendor vacuum pumps, enhancing real-time control and semiconductor manufacturing efficiency.
Existing CMS System Issues
Issues
- The old system lacked real-time communication, delaying timely process defect corrections.
- No historical data query mechanism in any systems, resulting in insufficient data granularity for process analysts to effectively analyze incident causes.
- Unable to predict pump status in real-time, leading to unplanned equipment downtime and impacting product yield.
- Different equipment and application systems had inconsistent operating logic and alarm display methods.
- System applications couldn't be modified or expanded independently, causing maintenance difficulties.
- After system implementation, vendors' lack of application maintenance.
- capabilities often delayed normal system operation.
Challenges
- To meet different process requirements and risk distribution needs, thousands of dry pumps from different manufacturers were used, each with different communication protocols and interfaces.
- Traditional CMS (Central Monitoring System) computers could only connect to 40 pumps each, while semiconductors in Taiwan required capacity for 62.5 times more equipment.
- Single SCADA software was limited to 200-300 connection points, while semiconductors in Taiwan required over 10 times that capacity
Scalable Architecture for Unified Dry Pump Communication and Control
Replace
Implemented multi-serial port devices to replace vendor-provided PCs, preventing hard drive failures and enabling rapid restart within seconds. The device can connect to sixteen pumps of different brands, models, and protocols.
Single connection
Single-port connection facilitates rapid pump replacement during maintenance or failure events.
Redundancy
Two backup monitoring computers observed all facility pumps and recorded long-term operational alarms and data.
Unify
All equipment connected via Ethernet to the supervisory system, operating under unified logic regardless of brand or model, meeting sponsor requirements.
Implement Results
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Real-time Information Display
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Improved Communication Efficiency
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Enhanced Maintenance Capability
Each dry pump had an independent isolated communication line to dedicated CGW smart gateway ports, increasing data transmission speed and reducing impact of disconnections.
- Unified integration of dry pumps from different vendors.
- S-CMS built on open platform architecture with available source code for faster, more complete maintenance.
- Implemented redundant ring network backbone with CGW smart gateways as control centers, transmitting pump operation status to facility control room and FDC system via message bus.
Value Creation
- Long-term data accumulation in databases enabled verification of vendor-claimed equipment reliability parameters (MTBF, MTTR) through reporting tools, maximizing equipment uptime.
- Real-time monitoring information enabled equipment utilization analysis, examining downtime causes, frequency, and duration to improve and reduce downtime, thereby increasing production equipment uptime.
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